Invention Grant
- Patent Title: MEMS component having two different internal pressures
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Application No.: US15780282Application Date: 2016-10-12
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Publication No.: US10752498B2Publication Date: 2020-08-25
- Inventor: Achim Breitling , Eckhard Graf , Jens Frey , Jochen Reinmuth , Mawuli Ametowobla
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@71b69d39
- International Application: PCT/EP2016/074458 WO 20161012
- International Announcement: WO2017/097464 WO 20170615
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B7/00 ; G01P1/02

Abstract:
A method for manufacturing a micromechanical component including a substrate and a cap which is joined to the substrate, and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. In a first step, an access opening connecting the first cavity to surroundings of the micromechanical component being formed in the substrate or in the cap. In a second step, the first pressure and/or the first chemical composition in the first cavity being set. In a third step, the access opening being sealed by introducing energy or heat into an absorbing portion of the substrate or the cap with the aid of a laser, a reversible getter for further setting the first pressure and/or the first chemical composition being introduced into the first cavity chronologically prior to the third step.
Public/Granted literature
- US20180346324A1 MEMS COMPONENT HAVING TWO DIFFERENT INTERNAL PRESSURES Public/Granted day:2018-12-06
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