Invention Grant
- Patent Title: Manufacturing method for metal grating, metal grating and display device
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Application No.: US15941920Application Date: 2018-03-30
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Publication No.: US10754247B2Publication Date: 2020-08-25
- Inventor: Yonglian Qi , Lianjie Qu , Bingqiang Gui , Hebin Zhao , Yun Qiu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Womble Bond Dickinson (US) LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5b03e8f1
- Main IPC: G03F7/09
- IPC: G03F7/09 ; G03F7/20 ; G03F7/42 ; G02B5/18 ; G02B5/30 ; G02F1/1335 ; H01L51/52 ; C23F4/00 ; G03F7/00

Abstract:
The present disclosure proposes a manufacturing method for a metal grating, a metal grating, and a display device. The manufacturing method comprises: forming a metal layer, an antireflective layer and a deep UV photoresist layer sequentially on a base substrate; etching the deep UV photoresist layer by a photolithography process, so as to form a grating mask pattern; etching the antireflective layer by a dry etching process with the help of the grating mask pattern, so as to form an etch mask pattern identical to the grating mask pattern; peeling off the grating mask pattern; etching the metal layer by a dry etching process with the help of the etch mask pattern, so as to form metal grating strips; and removing the etch mask pattern, thus forming a metal grating.
Public/Granted literature
- US20190041746A1 MANUFACTURING METHOD FOR METAL GRATING, METAL GRATING AND DISPLAY DEVICE Public/Granted day:2019-02-07
Information query
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