Invention Grant
- Patent Title: Method for forming dynamic random access memory structure
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Application No.: US16571202Application Date: 2019-09-16
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Publication No.: US10763264B2Publication Date: 2020-09-01
- Inventor: En-Chiuan Liou , Yu-Cheng Tung , Chih-Wei Yang , Sho-Shen Lee
- Applicant: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: TW Hsin-Chu CN Quanzhou, Fujian Province
- Agent Winston Hsu
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1745b0f2
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C11/401

Abstract:
The present invention provides a method for forming a dynamic random access memory (DRAM) structure, the method including: firstly, a substrate is provided, a cell region and a peripheral region are defined on the substrate, a plurality of buried word lines is then formed in the cell region of the substrate, next, a shallow trench isolation structure is formed in the peripheral region adjacent to the cell region, wherein a concave top surface is formed on the shallow trench isolation structure, afterwards, a first dummy bit line gate is formed within the shallow trench isolation structure of the peripheral area, and a second dummy bit line gate is formed in the cell region and adjacent to the first dummy bit line gate, wherein a top surface of the first dummy bit line gate is lower than a top surface of the second dummy bit line gate.
Public/Granted literature
- US20200013783A1 METHOD FOR FORMING DYNAMIC RANDOM ACCESS MEMORY STRUCTURE Public/Granted day:2020-01-09
Information query
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