- 专利标题: Method for forming dynamic random access memory structure
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申请号: US16571202申请日: 2019-09-16
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公开(公告)号: US10763264B2公开(公告)日: 2020-09-01
- 发明人: En-Chiuan Liou , Yu-Cheng Tung , Chih-Wei Yang , Sho-Shen Lee
- 申请人: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- 申请人地址: TW Hsin-Chu CN Quanzhou, Fujian Province
- 专利权人: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- 当前专利权人: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu CN Quanzhou, Fujian Province
- 代理商 Winston Hsu
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1745b0f2
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; G11C11/401
摘要:
The present invention provides a method for forming a dynamic random access memory (DRAM) structure, the method including: firstly, a substrate is provided, a cell region and a peripheral region are defined on the substrate, a plurality of buried word lines is then formed in the cell region of the substrate, next, a shallow trench isolation structure is formed in the peripheral region adjacent to the cell region, wherein a concave top surface is formed on the shallow trench isolation structure, afterwards, a first dummy bit line gate is formed within the shallow trench isolation structure of the peripheral area, and a second dummy bit line gate is formed in the cell region and adjacent to the first dummy bit line gate, wherein a top surface of the first dummy bit line gate is lower than a top surface of the second dummy bit line gate.
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