- 专利标题: Circuits having a diffusion break with avoided or reduced adjacent semiconductor channel strain relaxation, and related methods
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申请号: US16895909申请日: 2020-06-08
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公开(公告)号: US10763364B1公开(公告)日: 2020-09-01
- 发明人: Stanley Seungchul Song , Kern Rim , Da Yang , Peijie Feng
- 申请人: QUALCOMM Incorporated
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM Incorporated
- 当前专利权人: QUALCOMM Incorporated
- 当前专利权人地址: US CA San Diego
- 代理机构: Withrow & Terranova, PLLC
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/06 ; H01L27/092 ; H01L29/165 ; H01L29/423 ; H01L21/8238 ; H01L29/66
摘要:
Cell circuits having a diffusion break with avoided or reduced adjacent semiconductor channel strain relaxation and related methods are disclosed. In one aspect, a cell circuit includes a substrate of semiconductor material and a semiconductor channel structure(s) of a second semiconductor material disposed on the substrate. The semiconductor material applies a stress to the formed semiconductor channel structure(s) to induce a strain in the semiconductor channel structure(s) for increasing carrier mobility. A diffusion break comprising a dielectric material extends through a surrounding structure of an interlayer dielectric, and the semiconductor channel structure(s) and at least a portion of the substrate. The relaxation of strain in areas of the semiconductor channel structure(s) adjacent to the diffusion break is reduced or avoided, because the semiconductor channel structure(s) is constrained by the surrounding structure.
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