- 专利标题: Method for manufacturing phase change memory
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申请号: US16136464申请日: 2018-09-20
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公开(公告)号: US10770656B2公开(公告)日: 2020-09-08
- 发明人: Gloria Wing Yun Fraczak , Matthew Brightsky , Chung Hon Lam , Fabio Carta , Robert Bruce , Takeshi Masuda , Koukou Suu
- 申请人: International Business Machines Corporation , ULVAC Technologies, Inc.
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Paterson + Sheridan, LLP
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Method(s) and apparatuses for forming a phase change memory. A method includes: forming a crystalline phase-change layer at a first position in along a surface of a first semiconductor layer, and forming an amorphous phase-change layer at a second position along the surface of a second semiconductor layer, wherein the crystalline phase-change layer and the amorphous phase-change layer are in contact.
公开/授权文献
- US20200098986A1 METHOD FOR MANUFACTURING PHASE CHANGE MEMORY 公开/授权日:2020-03-26
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