Invention Grant
- Patent Title: MEMS microphone device and electronics apparatus
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Application No.: US16339455Application Date: 2016-10-08
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Publication No.: US10773950B2Publication Date: 2020-09-15
- Inventor: Quanbo Zou
- Applicant: GOERTEK. INC
- Applicant Address: CN Weifang
- Assignee: WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
- Current Assignee: WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
- Current Assignee Address: CN Weifang
- Agency: Miles & Stockbridge P.C.
- Agent Ajay Jagtiani
- International Application: PCT/CN2016/101473 WO 20161008
- International Announcement: WO2018/064803 WO 20180412
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B7/00
Abstract:
An MEMS microphone device and an electronics apparatus are provided. The MEMS microphone device comprises: a substrate; a MEMS microphone element placed on the substrate; a cover encapsulating the MEMS microphone element together with the substrate; and an acoustic port for the MEMS microphone element, wherein a compliant membrane is provided to seal the acoustic port, and the membrane has a mechanical stiffness lower than that of the diaphragm of the MEMS microphone element.
Public/Granted literature
- US20200039816A1 MEMS MICROPHONE DEVICE AND ELECTRONICS APPARATUS Public/Granted day:2020-02-06
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