Invention Grant
- Patent Title: Integrated circuit product with a multi-layer single diffusion break and methods of making such products
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Application No.: US16256252Application Date: 2019-01-24
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Publication No.: US10777637B2Publication Date: 2020-09-15
- Inventor: Hong Yu , Jiehui Shu , Hui Zang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/66 ; H01L27/088 ; H01L21/8234 ; H01L29/78

Abstract:
One illustrative integrated circuit product disclosed herein includes a single diffusion break (SDB) isolation structure positioned between a first fin portion and a second fin portion, wherein the first fin portion comprises a first end surface and the second fin portion comprises a second end surface. In this example, the SDB structure includes a conformal liner layer that engages the first end surface of the first fin portion and the second end surface of the second fin portion, an insulating material positioned on the conformal liner layer, a cap structure positioned above an upper surface of the insulating material and an air gap positioned between a bottom surface of the cap structure and the upper surface of the insulating material.
Public/Granted literature
- US20200243643A1 INTEGRATED CIRCUIT PRODUCT WITH A MULTI-LAYER SINGLE DIFFUSION BREAK AND METHODS OF MAKING SUCH PRODUCTS Public/Granted day:2020-07-30
Information query
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