- 专利标题: Fabrication of a quantum device
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申请号: US16252230申请日: 2019-01-18
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公开(公告)号: US10777728B2公开(公告)日: 2020-09-15
- 发明人: Pavel Aseev , Philippe Caroff-Gaonac'h
- 申请人: Microsoft Technology Licensing, LLC
- 申请人地址: US WA Redmond
- 专利权人: Microsoft Technology Licensing, LLC
- 当前专利权人: Microsoft Technology Licensing, LLC
- 当前专利权人地址: US WA Redmond
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: H01L39/24
- IPC分类号: H01L39/24 ; H01L39/22 ; H01L39/12 ; G06N10/00
摘要:
In a masking phase, a first segment of an amorphous mask is formed on an underlying layer of a substrate. The first segment comprises a first set of trenches exposing the underlying layer. In the masking phase, a second segment of the amorphous mask is formed on the underlying layer. The second segment comprises a second set of trenches exposing the underlying layer. The segments are non-overlapping. An open end of one of the first set of trenches faces an open end of one of the second set of trenches, but the ends are separated by a portion of the amorphous mask. In a semiconductor growth phase, semiconductor material is grown, by selective area growth, in the first and second sets of trenches to form first and second sub-networks of nanowires on the underlying layer. The first and second sub-networks of nanowires are joined to form a single nanowire network.
公开/授权文献
- US20200235276A1 FABRICATION OF A QUANTUM DEVICE 公开/授权日:2020-07-23
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