Invention Grant
- Patent Title: Micromechanical component
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Application No.: US16063574Application Date: 2017-01-11
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Publication No.: US10781097B2Publication Date: 2020-09-22
- Inventor: Christoph Schelling
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard A. Messina
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@210022bc
- International Application: PCT/EP2017/050451 WO 20170111
- International Announcement: WO2017/121744 WO 20170720
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B7/00 ; B81B7/02 ; H01L23/00

Abstract:
A micromechanical component, having a carrier wafer having at least one micromechanical structure that is situated in a cavern; a thin-layer cap situated on the carrier wafer, by which the cavern is hermetically sealed; and a cap wafer situated on the thin-layer cap in the region of the cavern having the micromechanical structure, the cap wafer hermetically sealing a region of the thin-layer cap above the cavern.
Public/Granted literature
- US20190002277A1 MICROMECHANICAL COMPONENT Public/Granted day:2019-01-03
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