Invention Grant
- Patent Title: Ionizing radiation blocking in IC chip to reduce soft errors
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Application No.: US13409643Application Date: 2012-03-01
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Publication No.: US10784200B2Publication Date: 2020-09-22
- Inventor: Mukta G. Farooq , Ian D. Melville , Kevin S. Petrarca , Kenneth P. Rodbell
- Applicant: Mukta G. Farooq , Ian D. Melville , Kevin S. Petrarca , Kenneth P. Rodbell
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Alvin Borromeo, Esq.
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/556

Abstract:
Methods of blocking ionizing radiation to reduce soft errors and resulting IC chips are disclosed. One embodiment includes forming a front end of line (FEOL) for an integrated circuit (IC) chip; and forming at least one back end of line (BEOL) dielectric layer including ionizing radiation blocking material therein. Another embodiment includes forming a front end of line (FEOL) for an integrated circuit (IC) chip; and forming an ionizing radiation blocking layer positioned in a back end of line (BEOL) of the IC chip. The ionizing radiation blocking material or layer absorbs ionizing radiation and reduces soft errors within the IC chip.
Public/Granted literature
- US20120161300A1 IONIZING RADIATION BLOCKING IN IC CHIP TO REDUCE SOFT ERRORS Public/Granted day:2012-06-28
Information query
IPC分类: