Invention Grant
- Patent Title: Photodetection element having a periodic nano-concave/convex structure
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Application No.: US16100457Application Date: 2018-08-10
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Publication No.: US10784393B2Publication Date: 2020-09-22
- Inventor: Hiroyasu Fujiwara , Wei Dong , Kazutoshi Nakajima , Shohei Hayashi
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@373cad15
- Main IPC: H01L31/08
- IPC: H01L31/08 ; H01L31/02 ; H01L31/0352 ; H01L31/07 ; H01L31/10 ; H01L31/108 ; H01L31/101 ; H01L31/0232 ; H01L31/0224

Abstract:
A photodetection element is a photodetection element having an incidence surface for light on a back surface of a semiconductor layer, and includes a periodic nano-concave/convex structure provided on a front surface of the semiconductor layer and having convex portions and concave portions constituting a longitudinal resonator and a transverse resonator for the light incident from the incidence surface, the periodic nano-concave/convex structure converting the light into surface plasmons, and a metal film provided to cover the periodic nano-concave/convex structure, a height and an arrangement pitch of the convex portions in the periodic nano-concave/convex structure are set such that a resonance wavelength of the longitudinal resonator and a resonance wavelength of the transverse resonator match, and a thickness of the metal film is equal to or greater than 20 nm.
Public/Granted literature
- US20190058073A1 PHOTODETECTION ELEMENT Public/Granted day:2019-02-21
Information query
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