- 专利标题: NVM memory HKMG integration technology
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申请号: US16393159申请日: 2019-04-24
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公开(公告)号: US10811426B2公开(公告)日: 2020-10-20
- 发明人: Wei Cheng Wu , Chien-Hung Chang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/11573
- IPC分类号: H01L27/11573 ; H01L29/423 ; H01L27/11568 ; H01L29/51 ; H01L29/66 ; H01L21/28 ; H01L27/11536
摘要:
The present disclosure relates to a method of forming an integrated circuit (IC). In some embodiments, a substrate is provided comprising a memory region and a logic region disposed adjacent to the memory region. The memory region comprises a non-volatile memory (NVM) device having a control gate electrode and a select gate electrode disposed between two neighboring source/drain regions over a substrate. The control gate electrode and the select gate electrode comprise polysilicon. The logic region comprises a logic device including a metal gate electrode disposed between two neighboring source/drain regions over a logic gate dielectric and having bottom and sidewall surfaces covered by a high-k gate dielectric layer.
公开/授权文献
- US20190252399A1 NVM MEMORY HKMG INTEGRATION TECHNOLOGY 公开/授权日:2019-08-15
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