Invention Grant
- Patent Title: Non-contact type displacement sensor
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Application No.: US16519117Application Date: 2019-07-23
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Publication No.: US10830585B2Publication Date: 2020-11-10
- Inventor: Koji Kubo , Yuko Shishido
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@37f95185
- Main IPC: G01C3/32
- IPC: G01C3/32 ; G01C3/02 ; G02B3/14 ; H04N5/232 ; G01S17/08 ; H04N5/225 ; G02B26/00

Abstract:
A non-contact type displacement sensor includes a light source that emits measurement light; a liquid lens apparatus in which a refractive index periodically changes in response to an input drive signal; an objective lens emitting, at a measurable object, the measurement light that is emitted from the light source and has passed through the liquid lens apparatus; a photodetector receiving the measurement light that is reflected by the measurable object and outputs a photodetection signal; and a signal processor (controller) that calculates focus timing with which the measurement light is in focus on a surface of the measurable object based on the photodetection signal output from the photodetector, and that obtains a position of the measurable object based on a phase of the focus timing with respect to a cycle of the drive signal.
Public/Granted literature
- US20200041267A1 NON-CONTACT TYPE DISPLACEMENT SENSOR Public/Granted day:2020-02-06
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