发明授权
- 专利标题: Optical encoder
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申请号: US14919188申请日: 2015-10-21
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公开(公告)号: US10831035B2公开(公告)日: 2020-11-10
- 发明人: Akihide Kimura
- 申请人: Mitutoyo Corporation
- 申请人地址: JP Kawasaki
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kawasaki
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5001f0c2
- 主分类号: G02B27/42
- IPC分类号: G02B27/42 ; G01D5/38 ; G01D5/347 ; G02B27/14
摘要:
An optical encoder 10 comprising: a light source 11; a splitter 12 splits a light from the light source 11, a light receiving unit 16; a scale 13 is arranged on a light path and movable in a measurement direction, a grating being arranged on a main surface of the scale; and an offset diffraction grating 14 includes a plurality of diffraction gratings arranged in the optical path from the splitter 12 to the light receiving unit 16, the plurality of diffraction gratings diffracting the split lights with different phases, wherein, the plurality of diffraction gratings 13 in the offset diffraction grating 14 are arranged in one plane parallel to the main surface of the scale and are offset each other in an offset direction orthogonal to the measurement direction, the light receiving unit 16 includes a plurality of light-receiving elements 16-11 to 16-23 arranged in the offset direction.
公开/授权文献
- US20160116757A1 OPTICAL ENCODER 公开/授权日:2016-04-28
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