- 专利标题: Apparatus for inspecting object surface
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申请号: US16120551申请日: 2018-09-04
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公开(公告)号: US10852243B2公开(公告)日: 2020-12-01
- 发明人: Takahiro Kamikawa , Hiroshi Ohno , Takehiro Hato
- 申请人: Kabushiki Kaisha Toshiba
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2018-004536 20180115
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G01N21/47
摘要:
An apparatus for inspecting object surface according to an embodiment includes: an imaging device including an imaging area; an optical source; and a group of optical devices including a mirror and a lens, and causing a reflected light other than a regular reflection light from an object to be reflected by a mirror surface of the mirror, and to form an image in the imaging area of the imaging device through the lens, the regular reflection light being caused by a light incident to a surface of the object from the optical source, wherein the optical source, the mirror, the lens, and the imaging device are arranged in such a manner that the regular reflection light is not incident to the imaging area of the imaging device through the mirror and the lens.
公开/授权文献
- US20190219515A1 APPARATUS FOR INSPECTING OBJECT SURFACE 公开/授权日:2019-07-18
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