Invention Grant
- Patent Title: Showerhead assembly and components thereof
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Application No.: US14444744Application Date: 2014-07-28
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Publication No.: US10858737B2Publication Date: 2020-12-08
- Inventor: Carl White , Eric Shero , Jereld Lee Winkler , David Marquardt
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44
Abstract:
Showerhead assemblies, gas distribution plates, and systems including the same are disclosed. Exemplary showerhead assemblies include a gas distribution plate. Exemplary gas distribution plates include apertures designed to direct a flow of gas and to reduce stagnation of gas on surfaces of the plates.
Public/Granted literature
- US20160024656A1 SHOWERHEAD ASSEMBLY AND COMPONENTS THEREOF Public/Granted day:2016-01-28
Information query
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