• Patent Title: Method for forming pattern for liquid crystal orientation of zenithal bi-stable liquid crystal panel, liquid crystal orientation substrate including pattern formed thereby, and mask substrate used for forming pattern
  • Application No.: US16491552
    Application Date: 2018-02-13
  • Publication No.: US10859875B2
    Publication Date: 2020-12-08
  • Inventor: So Young ChooJin Soo LeeEun Kyu HerBu Gon Shin
  • Applicant: LG CHEM, LTD.
  • Applicant Address: KR Seoul
  • Assignee: LG CHEM, LTD.
  • Current Assignee: LG CHEM, LTD.
  • Current Assignee Address: KR Seoul
  • Agency: Dentons US LLP
  • Priority: KR10-2017-0028839 20170307
  • International Application: PCT/KR2018/001898 WO 20180213
  • International Announcement: WO2018/164388 WO 20180913
  • Main IPC: G02F1/1337
  • IPC: G02F1/1337 G02F1/139 G03F7/00 G03F1/80
Method for forming pattern for liquid crystal orientation of zenithal bi-stable liquid crystal panel, liquid crystal orientation substrate including pattern formed thereby, and mask substrate used for forming pattern
Abstract:
Disclosed are a method for forming a pattern for liquid crystal orientation of a zenithal bi-stable liquid crystal panel, a liquid crystal orientation substrate including the pattern formed thereby, and a mask substrate used for forming the pattern. The method includes: (a) depositing a silicon-based compound on a silicon substrate, (b) forming a guide pattern on an upper portion of the deposited silicon-based compound layer by using an imprint lithography, (c) discontinuously exposing the silicon substrate by transferring a pattern from the guide pattern onto the silicon-based compound layer by dry etching, (d) forming a pattern in an asymmetrical form on the silicon substrate by wet etching, (e) removing the part of the remaining silicon-based compound layer, and then hydrophobically treating a pattern surface of the silicon substrate; and (f) transferring a pattern in an asymmetrical form onto a glass substrate by disposing the surface-treated silicon substrate to face the glass substrate, and supplying a dielectric therebetween.
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