- 专利标题: Semiconductor device comprising an oxide semiconductor
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申请号: US16384069申请日: 2019-04-15
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公开(公告)号: US10861981B2公开(公告)日: 2020-12-08
- 发明人: Junichi Koezuka , Masami Jintyou , Yukinori Shima
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 申请人地址: JP Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office
- 代理商 Eric J. Robinson
- 优先权: JP2015-104502 20150522; JP2015-150231 20150730
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/49 ; H01L29/417 ; H01L29/24 ; H01L29/04 ; H01L27/12 ; H01L29/66 ; H01L21/02 ; H01L21/477 ; H01L21/465 ; H01L21/4757 ; H01L29/423 ; H01L27/32
摘要:
The reliability of a transistor including an oxide semiconductor can be improved by suppressing a change in electrical characteristics. A transistor included in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region in contact with the gate insulating film, a source region in contact with the second insulating film, and a drain region in contact with the second insulating film. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.
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