Invention Grant
- Patent Title: Semiconductor device comprising an oxide semiconductor
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Application No.: US16384069Application Date: 2019-04-15
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Publication No.: US10861981B2Publication Date: 2020-12-08
- Inventor: Junichi Koezuka , Masami Jintyou , Yukinori Shima
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2015-104502 20150522; JP2015-150231 20150730
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/49 ; H01L29/417 ; H01L29/24 ; H01L29/04 ; H01L27/12 ; H01L29/66 ; H01L21/02 ; H01L21/477 ; H01L21/465 ; H01L21/4757 ; H01L29/423 ; H01L27/32

Abstract:
The reliability of a transistor including an oxide semiconductor can be improved by suppressing a change in electrical characteristics. A transistor included in a semiconductor device includes a first oxide semiconductor film over a first insulating film, a gate insulating film over the first oxide semiconductor film, a second oxide semiconductor film over the gate insulating film, and a second insulating film over the first oxide semiconductor film and the second oxide semiconductor film. The first oxide semiconductor film includes a channel region in contact with the gate insulating film, a source region in contact with the second insulating film, and a drain region in contact with the second insulating film. The second oxide semiconductor film has a higher carrier density than the first oxide semiconductor film.
Public/Granted literature
- US20190245091A1 SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING SEMICONDUCTOR DEVICE Public/Granted day:2019-08-08
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