Invention Grant
- Patent Title: Organic light-emitting display apparatus and method of manufacturing the same
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Application No.: US16577472Application Date: 2019-09-20
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Publication No.: US10862034B2Publication Date: 2020-12-08
- Inventor: Younggil Kwon
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2015-0103877 20150722
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L27/32 ; H01L51/56 ; H01L51/50 ; H01L51/52

Abstract:
A method of manufacturing an organic light-emitting display apparatus including forming a liftoff layer containing a fluoropolymer on a substrate, forming a photoresist on the liftoff layer and patterning the photoresist by removing a portion thereof, etching, using a first solvent, the liftoff layer in a region where the photoresist is removed so that a portion of the liftoff layer remains on the substrate, forming an etch stop layer above the liftoff layer that remains on the substrate and above a region where the photoresist remains on the liftoff layer, and removing, using a second solvent, the liftoff layer under the region where the photoresist remains on the liftoff layer.
Public/Granted literature
- US20200020857A1 ORGANIC LIGHT-EMITTING DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-01-16
Information query
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