Invention Grant
- Patent Title: Crucible, evaporation source and evaporation device
-
Application No.: US15983071Application Date: 2018-05-17
-
Publication No.: US10883167B2Publication Date: 2021-01-05
- Inventor: Dejiang Zhao , Guangcai Yuan
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Kinney & Lange, P.A.
- Priority: CN201720793045U 20170703
- Main IPC: C23C14/24
- IPC: C23C14/24 ; F27B14/12 ; F27B14/06 ; C23C14/54 ; F27B14/10 ; F27B14/08

Abstract:
A crucible, an evaporation source and an evaporation device are disclosed. The crucible includes a crucible body. The crucible body includes: an inner heating layer with a first heater assembly and an outer heating layer with a second heater assembly. The outer heating layer is at a periphery of the inner heating layer, and surrounds the inner heating layer, and a space between the outer heating layer and the inner heating layer defines an accommodation space for a to-be-evaporated material.
Public/Granted literature
- US20190003035A1 CRUCIBLE, EVAPORATION SOURCE AND EVAPORATION DEVICE Public/Granted day:2019-01-03
Information query
IPC分类: