Invention Grant
- Patent Title: System and method for micro-nano machining by femtosecond laser two-photon polymerization
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Application No.: US15500414Application Date: 2014-10-22
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Publication No.: US10884343B2Publication Date: 2021-01-05
- Inventor: Xing Cheng , Dehu Cui , Ziping Li , Jing Ming
- Applicant: South University of Science and Technology of China
- Applicant Address: CN Guangdong
- Assignee: South University of Science and Technology of China
- Current Assignee: South University of Science and Technology of China
- Current Assignee Address: CN Guangdong
- Agency: Barnes & Thornburg LLP
- Agent Jeffrey R. Stone
- Priority: CN201410375257 20140801
- International Application: PCT/CN2014/089190 WO 20141022
- International Announcement: WO2016/015389 WO 20160204
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00
Abstract:
Disclosed are a system and method for micro-nano machining by femtosecond laser two-photon polymerization. The system includes: a femtosecond laser, an external light path modulation unit, an image capture apparatus, a focusing lens, a displacement platform, a computer and a monitoring apparatus, where the image capture apparatus is configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs.
Public/Granted literature
- US20170212424A1 SYSTEM AND METHOD FOR MICRO-NANO MACHINING BY FEMTOSECOND LASTER TWO-PHOTON POLYMERIZATION Public/Granted day:2017-07-27
Information query
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