- 专利标题： Electrothermally actuated microelectromechanical and/or nanoelectromechanical structure providing increased efficiency
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申请号： US15768870申请日： 2016-10-20
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公开(公告)号： US10889490B2公开(公告)日： 2021-01-12
- 发明人: Guillaume Jourdan , Guillaume Lehee
- 申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , SAFRAN ELECTRONICS & DEFENSE
- 申请人地址： FR Paris; FR Boulogne Billancourt
- 专利权人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,SAFRAN ELECTRONICS & DEFENSE
- 当前专利权人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,SAFRAN ELECTRONICS & DEFENSE
- 当前专利权人地址： FR Paris; FR Boulogne Billancourt
- 代理机构： Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权： FR1560043 20151021
- 国际申请： PCT/EP2016/075188 WO 20161020
- 国际公布： WO2017/068025 WO 20170427
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B81B7/02 ; G02B6/35 ; G02B26/08
摘要：
An electrothermally actuated microelectromechanical and/or nanoelectromechanical structure including a stationary portion, at least one portion which is movable relative to the stationary portion, at least one electrothermal actuation beam which makes it possible to cause an electric current to flow from the stationary portion to the movable portion, is mechanically connected to the movable portion and is intended to move the movable portion relative to the stationary portion by electrothermal actuation, and at least one electrically conductive connection element electrically connecting the movable portion to the stationary portion, the actuation beam having a thickness of no greater than half one thickness of the movable portion and no greater than half one thickness of the connection element.
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