Invention Grant
- Patent Title: Object identification and comparison
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Application No.: US16490091Application Date: 2018-03-02
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Publication No.: US10890540B2Publication Date: 2021-01-12
- Inventor: Adrianus Cornelis Matheus Koopman , Scott Anderson Middlebrooks , Willem Marie Julia Marcel Coene
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2018/055164 WO 20180302
- International Announcement: WO2018/172039 WO 20180927
- Main IPC: G06F30/398
- IPC: G06F30/398 ; G01N21/956 ; G03F7/20

Abstract:
A method including selecting a shaped feature from a set of shaped features, each shaped feature of the set of shaped features having a set of points on a perimeter of the shape of the shaped feature, creating a plurality of shape context descriptors for the selected shaped feature, wherein each shape context descriptor provides an indication of a location in a shape context descriptor framework of a first focus point of the set of points in relation to a second point of the set of points, and identifying a shaped feature from the set of shaped features having a same or similar shape as the selected shaped feature based on data from the plurality of shape context descriptors.
Public/Granted literature
- US20200072761A1 OBJECT IDENTIFICATION AND COMPARISON Public/Granted day:2020-03-05
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