Invention Grant
- Patent Title: Integrated circuit (IC) device including a force mitigation system for reducing under-pad damage caused by wire bond
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Application No.: US16157826Application Date: 2018-10-11
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Publication No.: US10896888B2Publication Date: 2021-01-19
- Inventor: Justin Sato , Bomy Chen , Andrew Taylor
- Applicant: Microchip Technology Incorporated
- Applicant Address: US AZ Chandler
- Assignee: Microchip Technology Incorporated
- Current Assignee: Microchip Technology Incorporated
- Current Assignee Address: US AZ Chandler
- Agency: Slayden Grubert Beard PLLC
- Main IPC: H01L23/10
- IPC: H01L23/10 ; H01L23/00 ; H01L21/768

Abstract:
An integrated circuit chip (die) may include a force mitigation system for reducing or mitigating under-pad stresses typically caused by wire bonding. The IC die may include wire bond pads and a force mitigation system formed below each wire bond pad. The force mitigation system may include a “shock plate” (e.g., metal region), a sealing layer located above the shock plate, and a force mitigation layer including an array of sealed voids between the metal region and the sealing layer. The sealed voids in the force mitigation layer may be defined by forming openings in an oxide dielectric layer and forming a non-conformal sealing layer over the openings to define an array of sealed voids. The force mitigation system may mitigate stresses caused by a wire bond on each wire bond pad, which may reduce or eliminate wire-bond-related damage to semiconductor devices located in the under-pad regions of the die.
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Information query
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