Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16017840Application Date: 2018-06-25
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Publication No.: US10903314B2Publication Date: 2021-01-26
- Inventor: Wen-Shen Li , Ching-Yang Wen , Purakh Raj Verma , Xingxing Chen , Chee-Hau Ng
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: CN201810466671 20180516
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L23/528 ; H01L23/522 ; H01L21/311 ; H01L21/768 ; H01L21/306 ; H01L21/285

Abstract:
A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device includes an insulating layer, a semiconductor layer, a plurality of isolation structures, a transistor, a first contact, a plurality of silicide layers, and a protective layer. The semiconductor layer is disposed on a front side of the insulating layer. The plurality of isolation structures are disposed in the semiconductor layer. The transistor is disposed on the semiconductor layer. The first contact is disposed beside the transistor and passes through one of the plurality of isolation structures and the insulating layer therebelow. The plurality of silicide layers are respectively disposed on a bottom surface of the first contact and disposed on a source, a drain, and a gate of the transistor. The protective layer is disposed between the first contact and the insulating layer.
Public/Granted literature
- US20190355812A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-11-21
Information query
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