Invention Grant
- Patent Title: Polishing composition
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Application No.: US16476705Application Date: 2017-12-07
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Publication No.: US10907073B2Publication Date: 2021-02-02
- Inventor: Satoru Yarita , Yukinobu Yoshizaki
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Aichi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Aichi
- Agency: Katten Munchin Rosenman LLP
- Priority: JP2017-002695 20170111
- International Application: PCT/JP2017/044018 WO 20171207
- International Announcement: WO2018/131341 WO 20180719
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; H01L21/3105 ; H01L21/321

Abstract:
A polishing composition for use in polishing an object to be polished, which comprises abrasive grains, a dispersing medium, and an additive, wherein the abrasive grains are surface-modified, the additive is represented by the following formula 1: wherein in the formula 1, X1 is O or NR4, X2 is a single bond or NR5, R1 to R5 are each independently a hydrogen atom; a hydroxy group; a nitro group; a nitroso group; a C1-4 alkyl group optionally substituted with a carboxyl group, an amino group, or a hydroxy group; or CONH2; with the proviso that R2 and R5 may form a ring; when X2 is a single bond, R3 is not a hydrogen atom, or R1 to R3 are not a methyl group; and when X2 is NR5 and three of R1 to R3 and R5 are a hydrogen atom, the other one is not a hydrogen atom or a methyl group; and a pH is 5.0 or less. According to the present invention, a polishing composition capable of polishing not only polycrystalline silicon but also a silicon nitride film at high speed and also suppressing a polishing speed of a silicon oxide film is provided.
Public/Granted literature
- US20190352536A1 POLISHING COMPOSITION Public/Granted day:2019-11-21
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