- 专利标题: Semiconductor device
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申请号: US16926360申请日: 2020-07-10
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公开(公告)号: US10910374B2公开(公告)日: 2021-02-02
- 发明人: Sung Min Kim , Dong Won Kim
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Muir Patent Law, PLLC
- 优先权: KR10-2018-0041385 20180410
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L29/78 ; H01L29/10 ; H01L21/8234 ; H01L21/768 ; H01L29/66
摘要:
A semiconductor device is provided, which includes a first and second multichannel active patterns spaced apart from one another and extending in a first direction. The semiconductor device also includes first and second gate structures on the first and second multichannel active patterns, extending in a second direction and including first and second gate insulating films, respectively. Sidewalls of the first multichannel active pattern include first portions in contact with the first gate insulating film, second portions not in contact with the first gate insulating film, third portions in contact with the second gate insulating film, and fourth portions not in contact with the second gate insulating film. Additionally, a height of the first portions of the first multichannel active pattern is greater than a height of the third portions of the first multichannel active pattern.
公开/授权文献
- US20200343243A1 SEMICONDUCTOR DEVICE 公开/授权日:2020-10-29
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