- 专利标题: Optical sensor and method for forming the same
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申请号: US16235871申请日: 2018-12-28
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公开(公告)号: US10915727B2公开(公告)日: 2021-02-09
- 发明人: Hsin-Hui Lee , Han-Liang Tseng , Hsueh-Jung Lin
- 申请人: Vanguard International Semiconductor Corporation
- 申请人地址: TW Hsinchu
- 专利权人: Vanguard International Semiconductor Corporation
- 当前专利权人: Vanguard International Semiconductor Corporation
- 当前专利权人地址: TW Hsinchu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; H01L27/146 ; G02B27/30
摘要:
An optical sensor includes a substrate and a light collimating layer. The substrate includes a sensor pixel array having a plurality of sensor pixels. The light collimating layer is disposed on the substrate. The light collimating layer includes a patterned seed layer, a plurality of transparent pillars, a metal layer, and a mask layer. The patterned seed layer is disposed on the substrate. The patterned seed layer exposes the sensor pixel array. The transparent pillars are disposed on the sensor pixel array. The metal layer is disposed on the patterned seed layer and in between the transparent pillars. The mask layer is disposed on the metal layer.
公开/授权文献
- US20200210669A1 OPTICAL SENSOR AND METHOD FOR FORMING THE SAME 公开/授权日:2020-07-02
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