Invention Grant
- Patent Title: Rechargeable wafer carrier systems
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Application No.: US15233454Application Date: 2016-08-10
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Publication No.: US10931143B2Publication Date: 2021-02-23
- Inventor: Abner Bello , Stephanie Waite , William J. Fosnight
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H02J50/10
- IPC: H02J50/10 ; H02J7/00 ; H02J7/02 ; H01L21/677 ; H01L21/673

Abstract:
Rechargeable wafer carrier systems and methods are provided. A rechargeable wafer carrier system includes, for instance, a housing for holding at least one wafer and at least one electronics system therein, a rechargeable power source operably connected to the housing for powering the at least one electronics system, and a charging interface for receiving a supply of power for charging the rechargeable power source. The housing may be configured for transport within an automated material handling system. Also provided are methods of charging a rechargeable wafer carrier system, which includes, for instance, providing a rechargeable wafer carrier system having at least one electronics system and a rechargeable power source, operably connecting the rechargeable wafer carrier system to a charging base, and supplying power from the charging base to the rechargeable power source.
Public/Granted literature
- US20180048169A1 RECHARGEABLE WAFER CARRIER SYSTEMS Public/Granted day:2018-02-15
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