- 专利标题: Structured pedestal for MTJ containing devices
-
申请号: US16254021申请日: 2019-01-22
-
公开(公告)号: US10937945B2公开(公告)日: 2021-03-02
- 发明人: Nathan P. Marchack , Bruce B. Doris
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Daniel P. Morris, Esq.
- 主分类号: H01L43/02
- IPC分类号: H01L43/02 ; H01L43/12
摘要:
A magnetic tunnel junction (MTJ) containing device is provided that includes an undercut conductive pedestal structure having a concave sidewall positioned between a bottom electrode and a MTJ pillar. The geometric nature of such a conductive pedestal structure makes the pedestal structure unlikely to be resputtered and deposited on a sidewall of the MTJ pillar, especially the sidewall of the tunnel barrier of the MTJ pillar. Thus, electrical shorts caused by depositing resputtered conductive metal particles on the sidewall of the tunnel barrier of the MTJ pillar are substantially reduced.
公开/授权文献
- US20200235286A1 STRUCTURED PEDESTAL FOR MTJ CONTAINING DEVICES 公开/授权日:2020-07-23
信息查询
IPC分类: