Apparatus and method for inspecting glass substrate
Abstract:
An apparatus and method for inspecting a glass substrate. The apparatus for inspecting a glass substrate includes a stage configured to support the glass substrate, a first light source for irradiating light onto a surface of the glass substrate at a first angle, a first camera for capturing scattered light of the light irradiated from the first light source, a second light source for irradiating light onto the surface of the glass substrate at a second angle greater than the first angle, a second camera for capturing reflected light and scattered light of the light irradiated from the second light source, and a defect detection unit for detecting a defect of the glass substrate using a first image provided by the first camera and a second image provided by the second camera.
Public/Granted literature
Information query
Patent Agency Ranking
0/0