Invention Grant
- Patent Title: Apparatus and method for inspecting glass substrate
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Application No.: US16679919Application Date: 2019-11-11
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Publication No.: US10942132B2Publication Date: 2021-03-09
- Inventor: Jin Ho Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2018-0138320 20181112
- Main IPC: G01N21/896
- IPC: G01N21/896 ; G06T7/00 ; G01N21/88

Abstract:
An apparatus and method for inspecting a glass substrate. The apparatus for inspecting a glass substrate includes a stage configured to support the glass substrate, a first light source for irradiating light onto a surface of the glass substrate at a first angle, a first camera for capturing scattered light of the light irradiated from the first light source, a second light source for irradiating light onto the surface of the glass substrate at a second angle greater than the first angle, a second camera for capturing reflected light and scattered light of the light irradiated from the second light source, and a defect detection unit for detecting a defect of the glass substrate using a first image provided by the first camera and a second image provided by the second camera.
Public/Granted literature
- US20200150052A1 APPARATUS AND METHOD FOR INSPECTING GLASS SUBSTRATE Public/Granted day:2020-05-14
Information query
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