- 专利标题: Defect inspection device and method
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申请号: US16311839申请日: 2016-06-21
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公开(公告)号: US10942152B2公开(公告)日: 2021-03-09
- 发明人: Takahide Hatahori , Yuya Nagata , Kenji Takubo
- 申请人: Shimadzu Corporation
- 申请人地址: JP Kyoto
- 专利权人: Shimadzu Corporation
- 当前专利权人: Shimadzu Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Maier & Maier, PLLC
- 国际申请: PCT/JP2016/068387 WO 20160621
- 国际公布: WO2017/221324 WO 20171228
- 主分类号: G01N29/06
- IPC分类号: G01N29/06 ; G01N29/24 ; G01N29/34 ; G01N29/04 ; G01N29/44 ; G01N29/36 ; G01H3/12 ; G01B9/02 ; G01H9/00
摘要:
The defect inspection device is provided with a sound wave excitation unit for exciting a sound wave having a time waveform represented by a continuous periodic function to a prescribed position on the surface of an object to be measured, a displacement amount measurement unit for measuring a periodically varying displacement amount generated by the propagation of the sound wave from the prescribed position through the surface at at least three different phases of the periodic variation, and a periodic function acquisition unit for determining a periodic function expressing the periodic variation of the physical quantity on the basis of the displacement amount at the at least three different phases.
公开/授权文献
- US20190204275A1 SOUND-WAVE-PROPAGATION VISUALIZATION DEVICE AND METHOD 公开/授权日:2019-07-04
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