Invention Grant
- Patent Title: Modular high-frequency source with integrated gas distribution
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Application No.: US15958562Application Date: 2018-04-20
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Publication No.: US10943768B2Publication Date: 2021-03-09
- Inventor: Hanh Nguyen , Thai Cheng Chua , Philip Allan Kraus
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32

Abstract:
Embodiments described herein include an applicator frame for a processing chamber. In an embodiment, the applicator frame comprises a first major surface of the applicator frame and a second major surface of the applicator frame opposite the first major surface. In an embodiment, the applicator frame further comprises a through hole, wherein the through hole extends entirely through the applicator frame. In an embodiment, the applicator frame also comprises a lateral channel embedded in the applicator frame. In an embodiment the lateral channel intersects the through hole.
Public/Granted literature
- US20190326090A1 MODULAR HIGH-FREQUENCY SOURCE WITH INTEGRATED GAS DISTRIBUTION Public/Granted day:2019-10-24
Information query
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