Invention Grant
- Patent Title: Methods for thermally calibrating reaction chambers
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Application No.: US16833279Application Date: 2020-03-27
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Publication No.: US10943771B2Publication Date: 2021-03-09
- Inventor: Hyeongeu Kim , Loren Jacobs , Peter Westrom
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/46 ; G01J5/00 ; C23C16/52 ; G01K15/00

Abstract:
Methods for thermally calibrating reaction chambers are provided. In some embodiments, methods may include calculating a first correction factor of a first contact type temperature sensor within a first reaction chamber utilizing a first temperature sensor and applying the first correction factor to a first temperature controller to provide a first calibrated contact type temperature sensor. Embodiments may also include calculating a first calibration factor of a first non-contact type temperature sensor within the first reaction chamber utilizing the first calibrated contact type temperature sensor and applying the first calibration factor to the first non-contact type temperature sensor to provide a first calibrated non-contact type temperature sensor.
Public/Granted literature
- US20200227243A1 METHODS FOR THERMALLY CALIBRATING REACTION CHAMBERS Public/Granted day:2020-07-16
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