- 专利标题: Encoder scale, manufacturing method for encoder scale, and encoder
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申请号: US16173023申请日: 2018-10-29
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公开(公告)号: US10955265B2公开(公告)日: 2021-03-23
- 发明人: Akio Konishi
- 申请人: Seiko Epson Corporation
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JPJP2017-209385 20171030
- 主分类号: G01D5/34
- IPC分类号: G01D5/34 ; G01D5/347 ; G01D5/353 ; G01D5/36
摘要:
An encoder scale includes a tabular base material and an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern. The first region includes a resin layer disposed above the base material and including photosensitive resin and a metal film disposed above the resin layer and formed of a metal material. The surface of the first region is configured mainly by a first surface having a normal line in the thickness direction of the base material. The surface of the second region is configured mainly by a second surface inclined with respect to the first surface.