Invention Grant
- Patent Title: Air bearing
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Application No.: US16671479Application Date: 2019-11-01
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Publication No.: US10962053B2Publication Date: 2021-03-30
- Inventor: Hisayoshi Sakai , Kenji Ueda
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kanagawa
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Rankin, Hill & Clark LLP
- Priority: JPJP2018-213799 20181114
- Main IPC: F16C32/06
- IPC: F16C32/06 ; G01B21/04

Abstract:
An air bearing includes: a main body part having a bearing surface facing a guide surface; a flow path part provided in the main body part; an air film forming part that supplies compressed air flowing through the flow path part to the guide surface to form an air film; a negative pressure generating part that sucks air between the bearing surface and the guide surface, the negative pressure generating part being provided in the flow path part; a discharge path in communication with the flow path part; and a flow rate adjusting part that adjusts a flow rate of air flowing from the flow path part to the discharge path in accordance with a compressed air pressure corresponding to a load applied to the main body part.
Public/Granted literature
- US20200149587A1 AIR BEARING Public/Granted day:2020-05-14
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