发明授权
- 专利标题： Methods of forming near field transducers and near field transducers formed thereby
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申请号： US15638453申请日： 2017-06-30
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公开(公告)号： US10971180B2公开(公告)日： 2021-04-06
- 发明人: Sethuraman Jayashankar , Sarbeswar Sahoo
- 申请人： SEAGATE TECHNOLOGY LLC
- 申请人地址： US CA Cupertino
- 专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人地址： US CA Cupertino
- 代理机构： Mueting Raasch Group
- 主分类号： G11B5/60
- IPC分类号： G11B5/60 ; G11B5/31 ; G11B5/00 ; C23C14/48
摘要：
A method of forming a near field transducer (NFT), the method including the steps of depositing a primary material; and implanting a secondary element, wherein both the primary material and the secondary element are chosen such that the primary material is densified via implantation of the secondary element.
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