Invention Grant
- Patent Title: Active gas generating apparatus
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Application No.: US16621449Application Date: 2017-09-06
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Publication No.: US10971338B2Publication Date: 2021-04-06
- Inventor: Ren Arita , Kensuke Watanabe , Shinichi Nishimura
- Applicant: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Applicant Address: JP Chuo-ku
- Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Current Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Current Assignee Address: JP Chuo-ku
- Agency: Xsensus LLP
- International Application: PCT/JP2017/032060 WO 20170906
- International Announcement: WO2019/049230 WO 20190314
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
In an active gas generating apparatus, a power feeder is provided above metal electrodes in an integrated high-voltage electrode unit. When seen in plan view, the power feeder has a shape that entirely covers the metal electrodes in the integrated high-voltage electrode unit. Each of power feeding units is provided below the metal electrodes in an integrated ground electrode unit. When seen in plan view, each of the power feeding units has a shape that entirely covers the metal electrodes of the integrated ground electrode unit.
Public/Granted literature
- US20200152424A1 ACTIVE GAS GENERATING APPARATUS Public/Granted day:2020-05-14
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