Invention Grant
- Patent Title: Method and device for a carrier proximity mask
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Application No.: US16582261Application Date: 2019-09-25
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Publication No.: US10991547B2Publication Date: 2021-04-27
- Inventor: Morgan Evans , Charles T. Carlson , Rutger Meyer Timmerman Thijssen , Ross Bandy , Ryan Magee
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kacvinsky Daisak Bluni PLLC
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G02B5/18 ; H01L21/3065 ; H01L21/308 ; H01J37/305

Abstract:
A carrier proximity mask and methods of assembling and using the carrier proximity mask may include providing a first carrier body, second carrier body, and set of one or more clamps. The first carrier body may have one or more openings formed as proximity masks to form structures on a first side of a substrate. The first and second carrier bodies may have one or more contact areas to align with one or more contact areas on a first and second sides of the substrate. The set of one or more clamps may clamp the substrate between the first carrier body and the second carrier body at contact areas to suspend work areas of the substrate between the first and second carrier bodies. The openings to define edges to convolve beams to form structures on the substrate.
Public/Granted literature
- US20210090858A1 METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK Public/Granted day:2021-03-25
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