- 专利标题: Plasma processing device
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申请号: US16172863申请日: 2018-10-29
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公开(公告)号: US10991555B2公开(公告)日: 2021-04-27
- 发明人: Soo Beom Jo , Hae Young Yoo , Ju Hee Lee , Yong Mun Chang , Myung Soo Huh
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: H.C. Park & Associates, PLC
- 优先权: KR10-2018-0002803 20180109
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/3065
摘要:
A plasma processing device including a chamber, a plurality of dielectric windows covering a top portion of the chamber, a lid frame supporting the dielectric windows on a same plane, a plurality of supporting bars supporting a top portion of the lid frame, and a plurality of antennas positioned above the dielectric windows, in which the antennas include a first antenna positioned inside an area defined by the supporting bars and having a loop form, and a second antenna positioned outside the area defined by the supporting bars and having a loop form, and a first current direction in the first antenna and a second current direction in the second antenna are the same as each other.
公开/授权文献
- US20190214233A1 PLASMA PROCESSING DEVICE 公开/授权日:2019-07-11
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