Invention Grant
- Patent Title: Acoustic microelectronic device
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Application No.: US16469490Application Date: 2017-12-08
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Publication No.: US10993039B2Publication Date: 2021-04-27
- Inventor: Stephane Fanget , Caroline Coutier , Philippe Robert
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1662470 20161215
- International Application: PCT/EP2017/082094 WO 20171208
- International Announcement: WO2018/108754 WO 20180621
- Main IPC: H04R31/00
- IPC: H04R31/00 ; H04R17/00 ; B06B1/02 ; B06B1/06 ; G01N29/24 ; H04R19/00

Abstract:
An acoustic microelectronic device includes a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane. The device includes at least one bridge connecting the portions of two opposite edges of the trench and located overhanging at least one zone of the trench so as to form, in the zone of the trench, an acoustic insulation box below the bridge.
Public/Granted literature
- US20200007991A1 ACOUSTIC MICROELECTRONIC DEVICE Public/Granted day:2020-01-02
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