Electromagnetic induction type encoder
Abstract:
An electromagnetic induction type encoder includes a detection head and a scale. The detection head has a transmitter coil configured to generate magnetic flux. The scale has connection coils that are arrayed in a measurement axis direction, are configured to be electromagnetically coupled with magnetic flux generated by the transmitter coil and generate magnetic flux that fluctuates in a predetermined spatial period in the measurement axis direction. The detection head has a receiver coil having a plurality of coils that are arrayed in the measurement axis direction on a predetermined face of the detection head, are configured to be electromagnetically coupled with the magnetic flux generated by the connection coils and detect a phase of the magnetic flux. A current direction of one of the plurality of coils is opposite to a current direction of another coil of the plurality of coils next to each other.
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