Invention Grant
- Patent Title: Mask frame assembly including both frame and mask plate fixed on frame, and evaporation apparatus
-
Application No.: US16815865Application Date: 2020-03-11
-
Publication No.: US10996555B2Publication Date: 2021-05-04
- Inventor: Fengli Ji , Shanshan Bai , Yinan Liang
- Applicant: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. , BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Inner Mongolia; CN Beijing
- Assignee: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Inner Mongolia; CN Beijing
- Agency: Womble Bond Dickinson (US) LLP
- Priority: CN201610320002.8 20160513
- Main IPC: G03F1/42
- IPC: G03F1/42 ; C23C14/04 ; G03F1/64 ; B05C17/06 ; B05C17/08 ; B05B12/20 ; H01L21/308 ; G03F1/66 ; G03F1/68 ; H01L51/56 ; C23C16/04 ; B05D1/32 ; H01L51/00
Abstract:
A mask frame assembly and an evaporation apparatus are disclosed. The mask frame assembly comprises a frame and a mask plate fixed on the frame. The mask frame assembly is provided with alignment marks, which comprise a first alignment hole arranged in the frame and a second alignment hole arranged in the mask plate. The first alignment hole is a through hole. The mask frame assembly effectively solves a problem in which liquid residuals in alignment holes of the frame interfere with alignment.
Public/Granted literature
- US20200209735A1 MASK FRAME ASSEMBLY WITH ALIGNMENT MARKS IN BOTH FRAME AND MASK PLATE, AND EVAPORATION APPARATUS Public/Granted day:2020-07-02
Information query
