- 专利标题: XBAR resonators with non-rectangular diaphragms
-
申请号: US16838984申请日: 2020-04-02
-
公开(公告)号: US10998882B2公开(公告)日: 2021-05-04
- 发明人: Ventsislav Yantchev , Patrick Turner , Viktor Plesski , Julius Koskela , Robert B. Hammond
- 申请人: Resonant Inc.
- 申请人地址: US CA Goleta
- 专利权人: Resonant Inc.
- 当前专利权人: Resonant Inc.
- 当前专利权人地址: US CA Goleta
- 代理机构: Socal IP Law Group LLP
- 代理商 John E. Gunther
- 主分类号: H03H9/56
- IPC分类号: H03H9/56 ; H03H9/02 ; H03H9/17 ; H03H9/13 ; H03H9/60 ; H03H3/02 ; H01L41/047
摘要:
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate, the diaphragm having an edge about a perimeter of the cavity. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of the edge of the diaphragm is at an oblique angle to the fingers and to an X crystalline axis of the piezoelectric plate.
公开/授权文献
- US20200235719A1 XBAR RESONATORS WITH NON-RECTANGULAR DIAPHRAGMS 公开/授权日:2020-07-23
信息查询
IPC分类: