Invention Grant
- Patent Title: Method and apparatus for determining width-to-length ratio of channel region of thin film transistor
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Application No.: US16452952Application Date: 2019-06-26
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Publication No.: US11011437B2Publication Date: 2021-05-18
- Inventor: Yingbin Hu , Ce Zhao , Yuankui Ding , Wei Song , Jun Wang , Yang Zhang , Wei Li , Liangchen Yan
- Applicant: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD. , BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Anhui; CN Beijing
- Assignee: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.,BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Anhui; CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201811385425.3 20181120
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G03F7/20 ; H01L21/44 ; H01L21/467 ; H01L29/66 ; H01L29/786

Abstract:
The present disclosure provides a method for determining a width-to-length ratio of a channel region of a thin film transistor (TFT). The method includes: S1, setting an initial width-to-length ratio of the channel region; S2, manufacturing a TFT by using a mask plate according to the initial width-to-length ratio; S3, testing the TFT manufactured according to the initial width-to-length ratio; S4, determining whether or not the test result satisfies a predetermined condition, performing S5 if the test result satisfies the predetermined condition, and performing S6 if the test result does not satisfy the predetermined condition; S5, determining the initial width-to-length ratio as the width-to-length ratio of the channel region of the TFT; S6, changing the value of the initial width-to-length ratio, adjusting a position of the mask plate according to the changed initial width-to-length ratio, and performing S2 to S4 again.
Public/Granted literature
- US20200161196A1 Method and Apparatus for Determining Width-to-Length Ratio of Channel Region of Thin Film Transistor Public/Granted day:2020-05-21
Information query
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