- 专利标题: Method for forming fuse pad and bond pad of integrated circuit
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申请号: US15350372申请日: 2016-11-14
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公开(公告)号: US11011462B2公开(公告)日: 2021-05-18
- 发明人: Tai-I Yang , Chun-Yi Yang , Chih-Hao Lin , Hong-Seng Shue , Ruei-Hung Jang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L23/62
- IPC分类号: H01L23/62 ; H01L23/525 ; H01L23/00
摘要:
The present disclosure relates to a semiconductor device. A fuse layer is arranged within a first dielectric layer. A bond pad is arranged on the first dielectric layer. A second dielectric layer is arranged along sidewall and upper surfaces of the bond pad. A passivation layer is arranged over the first and second dielectric layers, and the passivation layer having a bond pad opening overlying the bond pad and a fuse opening overlying the fuse layer. The bond pad has a bottom surface that is co-planar with a bottom surface of the passivation layer.
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