Invention Grant
- Patent Title: Oxide semiconductor device and method of manufacturing the same
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Application No.: US16027386Application Date: 2018-07-05
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Publication No.: US11011649B2Publication Date: 2021-05-18
- Inventor: Zhibiao Zhou , Shao-Hui Wu , Chen-Bin Lin , Ding-Lung Chen , Chi-Fa Ku
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L29/66 ; H01L21/426 ; H01L27/12 ; H01L29/49

Abstract:
An oxide semiconductor device and a method for manufacturing the same are provided in the present invention. The oxide semiconductor device includes a back gate, an oxide semiconductor film, a pair of source and drain electrodes, a gate insulating film, a gate electrode on the oxide semiconductor film with the gate insulating film therebetween, an insulating layer covering only over the gate electrode and the pair of source and drain electrodes, and a top blocking film over the insulating layer.
Public/Granted literature
- US20180331233A1 OXIDE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-11-15
Information query
IPC分类: