Invention Grant
- Patent Title: Hybrid lift pin
-
Application No.: US16205899Application Date: 2018-11-30
-
Publication No.: US11018047B2Publication Date: 2021-05-25
- Inventor: Uday Kiran Rokkam , Eric Hill
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/687
- IPC: H01L21/687
Abstract:
A lift pin and a substrate support assembly and reactor including the lift pin are disclosed. The lift pin includes first section comprising a material having a first transparency and a second section comprising a material having a second transparency. The lift pin can provide improved temperature uniformity across substrate support assembly including the lift pin during substrate processing.
Public/Granted literature
- US20190229008A1 HYBRID LIFT PIN Public/Granted day:2019-07-25
Information query
IPC分类:
